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Showing 1 to 2 of 2 for “"Adhesion Lithography"”.
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Novel Thin Film Nanogap Device Fabrication And 3D Integration Enabled By Adhesion Lithography
… high resolution simultaneously. The advent of Adhesion Lithography (A-Lith) by Beesley et al. in 2014 provides a new way of nanoscale patterning for LAE processes. It is a self-alignment process that makes use of the characteristics of the self-assembled monolayer (SAM) on specific materials to …
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Self-Aligned Fabrication of Nanogap Based Zinc Oxide Nanowire Schottky Devices Using Adhesion Lithography
… expensive techniques such as electron beam lithography. To fabricate nano devices on a large scale, this work focuses on combining bottom-up nanowire growth with nanogap fabrication using adhesion lithography (A-Lith); a technique for producing coplanar nanogaps with a spacing of less than …