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Showing 1 to 4 of 4 for “"Active Vibration Suppression"”.

  1. Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants

    Vibration suppression is critical in precision mechatronic systems for nanofabrication. In semiconductor plants, automated wafer handling is performed by Overhead Hoist Transport (OHT) vehicles that transport wafers in front opening unified pods (FOUPs). When the wafers are transported in FOUPs, …

    mit Repository record for Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants (opens in a new tab)

  2. Structural Identification and Buffet Alleviation of Twin-Tailed Fighter Aircraft

    … Third is to suppress the high-amplitude vibrations of the tails due to either principal parametric or external excitations. To understand the dynamical characteristics of the twin-tails, the model is excited parametrically. For the same excitation amplitude and frequency, five different …

    vt Repository record for Structural Identification and Buffet Alleviation of Twin-Tailed Fighter Aircraft (opens in a new tab)

  3. Vibration Suppression Using Smart Materials in the Presence of Temperature Changes

    … satellite structures are also subject to various vibration sources. Passive and active vibration suppression techniques have been developed to minimize acoustic noise and fatigue stress damage. Featuring low weight solutions and high performance, active control techniques are becoming increasingly …

    vt Repository record for Vibration Suppression Using Smart Materials in the Presence of Temperature Changes (opens in a new tab)