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University of Illinois at Urbana-Champaign
Effect of Heavy Doping on the Diffusion of Impurities in Silicon
Abstract
dc:descriptionMade available in DSpace on 2015-05-12T17:12:11Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 5805459.PDF: 2105900 bytes, checksum: 25f55512e28ff7022370bb365502d837 (MD5) Previous issue date: 1958
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Physics
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Millea, Michael Francis
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (UMI)AAI5805459
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/76316