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University of Illinois at Urbana-Champaign
Modeling and measurements of an ionized physical vapor deposition device plasma
Degree
thesis:*- Name thesis:degree_name
- PhD
- Level thesis:degree_level
- Dissertation
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2012
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Juliano, Daniel Rene
- Contributors dc:contributor
-
- Ruzic, David N.
- Sullivan, Jeremiah D.
- Lamb, F.K.
- Van Harlingen, Dale J.
Identifiers
dc:identifier.*- Handle dc:identifier
- https://hdl.handle.net/2142/31254
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/31254