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University of Illinois - Chicago

Plasma and particles dynamics modeling in PECVD reactors.

dc:creator Mohammad. Davoudabadi (7999661)

dc:date2008

Abstract

dc:description

Plasma and particles dynamics modeling in PECVD reactors.

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Mohammad. Davoudabadi (7999661)

Subjects

dc:subject × 1

Engineering, Mechanical.

Rights

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Statement dc:rights: In Copyright

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Identifiers

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Identifier: 10027/13425
OAI identifier oai:identifier: oai:figshare.com:article/10951904

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Harvested from: University of Illinois - Chicago
Base URL: api.figshare.com/v2/oai
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

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citation

Mohammad. Davoudabadi (7999661). Plasma and particles dynamics modeling in PECVD reactors.. 2008.

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