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Investigation of thin film cobalt silicide formation on thermal oxide barrier layers
Abstract
dc:description.abstractNo abstract prepared.
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Larison, Dana L.
Subjects
dc:subject × 3Rights
- Language dc:language
- en
Identifiers
dc:identifier.*- Identifier
- Larison, D. L. (2004). Investigation of thin film cobalt silicide formation on thermal oxide barrier layers [Master's thesis, Texas State University-San Marcos].
- OAI identifier oai:identifier
- oai:tdl-ir.tdl.org:10877/13247