Development of a fabrication process for a MEMS component from ultra fine grained alloys

Qiao, Xiao Guang

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University of Southampton

Development of a fabrication process for a MEMS component from ultra fine grained alloys

dc:creator Qiao, Xiao Guang

dc:type.qualificationname Ph.D.

dc:date.issued2010

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search.dev.ndltd.org/etd/soton/oai:eprints.soton.ac.uk:185091

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thesis:*

Name dc:type.qualificationname: Ph.D.
Level dc:type.qualificationlevel: doctoral
Grantor dc:publisher.institution: University of Southampton
Year dc:date.issued: 2010

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Qiao, Xiao Guang

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Harvested from: University of Southampton
Base URL: eprints.soton.ac.uk/cgi/oai2
Last updated: 2026-07-24
Source record: OAI-PMH GetRecord

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soton
doctoral
2010

citation

Qiao, Xiao Guang. Development of a fabrication process for a MEMS component from ultra fine grained alloys. doctoral thesis, University of Southampton, 2010.

Development of a fabrication process for a MEMS component from ultra fine grained alloys

Degree

Author and committee

Chain of custody

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