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Rochester Institute of Technology
Multilayer Composite Structures for Stress Mitigation in Thin Films and MEMS applications.
Degree
thesis:*- Name thesis:degree_name
- Materials Science and Engineering (MS)
- Level thesis:degree_level
- Thesis
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Parthum, Michael J., Sr.
- Contributors dc:contributor
-
- Mark Kempski
Identifiers
dc:identifier.*- Repository record dc:identifier
- https://repository.rit.edu/theses/8133
- OAI identifier oai:identifier
- oai:repository.rit.edu:theses-9139