Analysis of effective mechanical properties of thin films used in microelectromechanical systems

Pasupuleti, Ajay

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Rochester Institute of Technology

Analysis of effective mechanical properties of thin films used in microelectromechanical systems

dc:creator Pasupuleti, Ajay

Degree

thesis:*

Level thesis:degree_level: Dissertation

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Pasupuleti, Ajay
Contributors dc:contributor: Sahin, Ferat

Subjects

dc:subject × 5

Mechanical
MEMS
Microelectronic systems
Soft computing
Thin film materials

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/7416
OAI identifier oai:identifier: oai:repository.rit.edu:theses-8421

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

Mechanical
MEMS
Microelectronic systems
rit
Dissertation

citation

Pasupuleti, Ajay. Analysis of effective mechanical properties of thin films used in microelectromechanical systems. Dissertation thesis, https://repository.rit.edu/theses/7416

Analysis of effective mechanical properties of thin films used in microelectromechanical systems

Degree

Author and committee

Subjects

Identifiers

Chain of custody

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