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Rochester Institute of Technology
Pupil wavefront manipulation for the compensation of mask topography effects in optical nanolithography
Degree
thesis:*- Name thesis:degree_name
- Microsystems Engineering (Ph.D.)
- Level thesis:degree_level
- Dissertation
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Sears, Monica
- Contributors dc:contributor
-
- Smith, Bruce
Subjects
dc:subject × 6Identifiers
dc:identifier.*- Repository record dc:identifier
- https://repository.rit.edu/theses/3
- OAI identifier oai:identifier
- oai:repository.rit.edu:theses-1009