Area Selective Deposition of Dielectric and Metal Thin Films by Controlled Nucleation during Atomic Layer Deposition and Etching.

Song, Seung Keun

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North Carolina State University

Area Selective Deposition of Dielectric and Metal Thin Films by Controlled Nucleation during Atomic Layer Deposition and Etching.

dc:creator Song, Seung Keun

dc:date.issued2021

Abstract

dc:description

North Carolina State University Theses Chemical Engineering.

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Song, Seung Keun
Advisors dc:contributor.advisor: Gregory Parsons, Chair
Franky So, Member
Michael Dickey, Member
Harold Lamb, Member

Identifiers

dc:identifier.*

Dc Identifier Other: deg25997
OAI record oai:identifier: https://repository.lib.ncsu.edu/server/oai/request?verb=GetRecord&metadataPrefix=dim&identifier=oai%3Arepository.lib.ncsu.edu%3A1840.20%2F38967

Chain of custody

source

Harvested from: North Carolina State University
Base URL: repository.lib.ncsu.edu/server/oai/request
Last updated: 2026-08-21
Source record: OAI-PMH GetRecord

related terms

ncsu
2021

citation

Song, Seung Keun. Area Selective Deposition of Dielectric and Metal Thin Films by Controlled Nucleation during Atomic Layer Deposition and Etching.. 2021. https://www.lib.ncsu.edu/resolver/1840.20/38967

Area Selective Deposition of Dielectric and Metal Thin Films by Controlled Nucleation during Atomic Layer Deposition and Etching.

Abstract

Author and committee

Identifiers

Chain of custody

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