Thermal Atomic Layer Etching and Vapor Phase Infiltration for Carbon Material Synthesis.

Xie, Wenyi

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North Carolina State University

Thermal Atomic Layer Etching and Vapor Phase Infiltration for Carbon Material Synthesis.

dc:creator Xie, Wenyi

dc:date.issued2019

Abstract

dc:description

North Carolina State University Theses Chemical Engineering.

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Xie, Wenyi
Advisors dc:contributor.advisor: Gregory Parsons, Co-Chair
Saad Khan, Co-Chair
Orlando Rojas, Co-Chair
Peter Fedkiw, Member
Jan Genzer, Graduate School Representative

Identifiers

dc:identifier.*

Dc Identifier Other: deg14703
OAI record oai:identifier: https://repository.lib.ncsu.edu/server/oai/request?verb=GetRecord&metadataPrefix=dim&identifier=oai%3Arepository.lib.ncsu.edu%3A1840.20%2F36582

Chain of custody

source

Harvested from: North Carolina State University
Base URL: repository.lib.ncsu.edu/server/oai/request
Last updated: 2026-08-21
Source record: OAI-PMH GetRecord

related terms

ncsu
2019

citation

Xie, Wenyi. Thermal Atomic Layer Etching and Vapor Phase Infiltration for Carbon Material Synthesis.. 2019. http://www.lib.ncsu.edu/resolver/1840.20/36582

Thermal Atomic Layer Etching and Vapor Phase Infiltration for Carbon Material Synthesis.

Abstract

Author and committee

Identifiers

Chain of custody

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