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Michigan Technological University

Porous silicon technology for integrated microsystems

dc:creator Wallner, Jin Zheng
thesis:degree_name Doctor of Philosophy in Electrical Engineering (PhD)

Degree

thesis:*
Name thesis:degree_name
Doctor of Philosophy in Electrical Engineering (PhD)
Level thesis:degree_level
Dissertation

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Wallner, Jin Zheng
Contributors dc:contributor
  • Paul L Bergstrom

Subjects

dc:subject × 2

Identifiers

dc:identifier.*
Identifier
https://digitalcommons.mtu.edu/etds/73
OAI identifier oai:identifier
oai:digitalcommons.mtu.edu:etds-1072

Chain of custody

source
Harvested from
Michigan Technological University
Base URL
digitalcommons.mtu.edu/do/oai/
Last updated
2026-07-27
Source record
OAI-PMH GetRecord
related terms
citation

Wallner, Jin Zheng. Porous silicon technology for integrated microsystems. Dissertation thesis, https://doi.org/10.37099/mtu.dc.etds/73

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