Performance measurements of MEMS analysis system

Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

1999

Author dc:creator

• Rodríguez, Ramón L. (Ramón Luis), 1976-

Advisor dc:contributor.advisor

• Donald E. Troxel.

• Electrical Engineering and Computer Science

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/9473

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/9473