Iron (III) Chloride doping of large-area chemical vapor deposition graphene

Chemical doping is an effective method of reducing the sheet resistance of graphene. This thesis aims to develop an effective method of doping large area Chemical Vapor Deposition (CVD) graphene using Iron (III) Chloride (FeCl 3). It is shown that evaporating FeCl3 can increase the carrier concentration of monolayer graphene to greater than 7x1 0 3CM2 and achieve resistances as low 72[Omega]/sq. We also evaluate other important properties of the doped graphene such as surface cleanliness, air stability, and solvent stability. Furthermore, we compare FeCl3 to three other common dopants: Gold (III) Chloride (AuCl3), Nitric Acid (I-N0 3), and TFSA ((CF 3SO2)2NH). We show that compared to these dopants, FeCl3 can not only achieve better sheet resistance but also has other key advantages including better solvent stability and better heat stability.

Department dc:contributor.department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2013

Author dc:creator

• Song, Yi, Ph. D. Massachusetts Institute of Technology

Advisor dc:contributor.advisor

• Jing Kong.

• Electrical Engineering and Computer Science.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/82384

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/82384