Back to search
Massachusetts Institute of Technology
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes
Abstract
dc:descriptionThesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
Degree
thesis:*- Department dc:contributor.department
- Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
- Grantor dc:publisher
- Massachusetts Institute of Technology
- Year dc:date.issued
- 2012
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
- Advisor dc:contributor.advisor
-
- Jung-Hoon Chun.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
- Licence dc:rights.uri
- Language dc:language.iso
- eng
Identifiers
dc:identifier.*- Handle dc:identifier.uri
- http://hdl.handle.net/1721.1/78187
- OAI identifier oai:identifier
- oai:dspace.mit.edu:1721.1/78187