Design of a novel six-axis metrology system for meso-scale nanopositioners

The purpose of this research is to develop the best possible means and methods of building a six axis metrology system given cost and space constraints. Six axis measurements are a crucial part of precision engineering and characterizing machine performance, however commercially available sensors are not cost-efficient and are difficult to incorporate into meso-scale machines. The novel approach presented here uses three pairs of laser diodes and quadrant photodiodes to achieve six axis measurements. This paper presents a general parametric model that can predict the output of the photodiodes due to translations and rotations of the target for any geometry of the system. The device has performance characteristics of translational resolution in the range of microns depending on the geometry of the system, a bandwidth of 17.5 MHz, and dominant noise in the sensor of ±1.6 nm. This device will be useful in a variety of applications including nanomanufacturing, bio instrumentation, Dip Pen Nanolithography, AFM, and many more.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Mechanical Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2009

Author dc:creator

• King, Ryan N. (Ryan Nicholas)

Advisor dc:contributor.advisor

• Martin L. Culpepper.

• Mechanical Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/54500

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/54500