Towards and industrial ecosystem for power MEMS

This thesis is concerned with the commercial applications of MEMS (Micro-Electro-Mechanical Systems) manufacturing processes to advanced energy technologies. This field of engineering has come to be known as Power MEMS. Four such technologies are singled-out for detailed consideration, based on the efforts that have gone into demonstrating the benefits which MEMS has to offer them. The first are micro engines or turbines which generate of order 10-100 Watts of power by driving an electric generator, as exemplified by the famous MIT microturbine. The second are micro fuel cells, electrochemical devices which air oxidize chemical fuels, particularly the direct methanol fuel cell which operates at modest temperatures and hence is suitable for use in portable electronics. The third are solid-state devices which convert heat into electricity via either the Seeback (thermocouple) or photovoltaic effects, or else via thermionic emission. Finally, we consider devices which scavenge vibrational or electromagnetic energy from their environment, and are an attractive means of powering remote autonomous sensors or medical implants such as pacemakers.

Department dc:contributor.department

Management of Technology Program.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2007

Author dc:creator

• Havel, Timothy Franklin

Advisor dc:contributor.advisor

• Charles H. Fine.

• Management of Technology Program.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/39505

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/39505