Chemical vapor etching of GaAs by CH3I

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Chemical Engineering

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

1994

Author dc:creator

• Krueger, Charles Winslow

Advisor dc:contributor.advisor

• Maria Flytzani-Stephanopoulos, Robert A. Brown.

• Chemical Engineering

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/37507

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/37507