Back to search

Massachusetts Institute of Technology

Measurement of adhesion and mechanical properties of thin films using microfabricated structures

Abstract

dc:description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.

Degree

thesis:*
Department dc:contributor.department
Massachusetts Institute of Technology. Dept. of Chemical Engineering.
Grantor dc:publisher
Massachusetts Institute of Technology
Year dc:date.issued
1989

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Allen, Mark George
Advisor dc:contributor.advisor
  • Stephen D. Senturia.

Subjects

dc:subject × 1

Rights

dc:rights
Statement dc:rights
  • M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Language dc:language.iso
eng

Identifiers

dc:identifier.*
Handle dc:identifier.uri
http://hdl.handle.net/1721.1/14329
OAI identifier oai:identifier
oai:dspace.mit.edu:1721.1/14329

Chain of custody

source
Harvested from
MIT
Base URL
dspace.mit.edu/oai/request
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Allen, Mark George. Measurement of adhesion and mechanical properties of thin films using microfabricated structures. Massachusetts Institute of Technology, 1989. http://hdl.handle.net/1721.1/14329