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Massachusetts Institute of Technology
The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics
Abstract
dc:descriptionThesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990
Degree
thesis:*- Name thesis:degree_name
- Doctoral
- Department dc:contributor.department
- Massachusetts Institute of Technology. Department of Chemistry
- Grantor dc:publisher
- Massachusetts Institute of Technology
- Year dc:date.issued
- 1990
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Schulberg, Michelle Tobi.
- Advisor dc:contributor.advisor
-
- Sylvia T. Ceyer.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
- Licence dc:rights.uri
Identifiers
dc:identifier.*- Handle dc:identifier.uri
- https://hdl.handle.net/1721.1/138564
- OAI identifier oai:identifier
- oai:dspace.mit.edu:1721.1/138564