Back to search
Technische Universiteit Eindhoven
Het chloreren van aangroeiende oxidelagen op silicium
Degree
thesis:*- Name dc:type.qualificationname
- Master
- Level dc:type.qualificationlevel
- Studentthesis types
- Year dc:date.issued
- 1979
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Coolsen, Jos F.
- Advisors dc:contributor.advisor
-
- van der Maesen, F.
- Kipperman, A.H.M.
Rights
- Language dc:language
- nld
Identifiers
dc:identifier.*- Identifier
- oai:pure.tue.nl:studenttheses/35af7d17-4019-4d83-b50a-5e262f6ab370
- OAI identifier oai:identifier
- oai:pure.tue.nl:studenttheses/35af7d17-4019-4d83-b50a-5e262f6ab370