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Universität Bielefeld
Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID)
Degree
thesis:*- Level thesis:degree_level
- thesis.doctoral
- Grantor dc:publisher
- Universität Bielefeld
- Year
- 2022
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Shih, Po-Yuan
Identifiers
dc:identifier.*- Repository record source_url
- https://pub.uni-bielefeld.de/record/2962553
- OAI identifier oai:identifier
- oai:pub.uni-bielefeld.de:2962553