Shaker
Ein spiegelmatrix-basiertes optisches 3D-Messsystem für die Mikrostrukturprüfung
Abstract
dc:descriptionThe goal of the work is the conception, design and validation of a new, flexible and low-priced optical surface measuring system with a resolution in the submicrometer range, i.e. for the inspection of microstructures. Quintessential point is the application of semiconductor-manufacturer Texas Instruments digital micromirror device (DMD). The developed measuring system shows similarities to autofocus methods and confocal microscopy, however, replacing the classical lateral scanning systems, as for example the wide-spread rotating Nipkow disk, which consists of a number of pinholes arranged in spirals, by the DMD. The work describes the fundamental functionality of the developed measuring system with special respect to the optical system design and the use of the DMD as lateral optical scanning instrument. It is specifically described, which principle procedures are used for the reproduction of the measured 3D-topography, how noise is handled, which interpolation strategies can be applied, how uncertain measuring points are recognized and which optical effects arise from the use of the DMD. Finally, some topography measurement-results obtained from the system are presented and further applications are demonstrated. With the presented DMD-based measuring system surfaces with lateral expansions between 73µm x 73µm and 730µm x 730µm can be measured optically with a vertical resolution of up to approximately 20 nm.
Degree
thesis:*- Grantor dc:publisher
- Shaker
- Year dc:date
- 2003
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Bitte, Frank
- Contributors dc:contributor
-
- Pfeifer, Tilo
Subjects
dc:subject × 9Rights
dc:rights- Statement dc:rights
-
- info:eu-repo/semantics/openAccess
- Language dc:language
- ger
Identifiers
dc:identifier.*- OAI identifier oai:identifier
- oai:publications.rwth-aachen.de:60848