Passive triggering of a high power Hollow cathode EUV Lamp for Lithography

Smith, Christopher

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Shaker

Passive triggering of a high power Hollow cathode EUV Lamp for Lithography

dc:creator Smith, Christopher

dc:date2006

Degree

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Grantor dc:publisher: Shaker
Year dc:date: 2006

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Smith, Christopher
Contributors dc:contributor: Poprawe, Reinhart

Rights

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Statement dc:rights: info:eu-repo/semantics/closedAccess
Language dc:language: eng

Identifiers

dc:identifier.*

Identifier: https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121250%22
OAI identifier oai:identifier: oai:publications.rwth-aachen.de:59469

Chain of custody

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Harvested from: RWTH Aachen University
Base URL: publications.rwth-aachen.de/oai2d
Last updated: 2026-07-30
Source record: OAI-PMH GetRecord

related terms

aachen
2006

citation

Smith, Christopher. Passive triggering of a high power Hollow cathode EUV Lamp for Lithography. Shaker, 2006. https://publications.rwth-aachen.de/record/59469