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Shaker

Untersuchungen zur Verwendung UV-härtender Resistmaterialien für die Nanoimprint-Lithographie

dc:creator Bender, Markus
dc:date2003

Degree

thesis:*
Grantor dc:publisher
Shaker
Year dc:date
2003

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Bender, Markus
Contributors dc:contributor
  • Kurz, Heinrich

Rights

dc:rights
Statement dc:rights
  • info:eu-repo/semantics/closedAccess
Language dc:language
ger

Identifiers

dc:identifier.*
Identifier
https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-120000%22
OAI identifier oai:identifier
oai:publications.rwth-aachen.de:58045

Chain of custody

source
Harvested from
RWTH Aachen University
Base URL
publications.rwth-aachen.de/oai2d
Last updated
2026-07-30
Source record
OAI-PMH GetRecord
related terms
citation

Bender, Markus. Untersuchungen zur Verwendung UV-härtender Resistmaterialien für die Nanoimprint-Lithographie. Shaker, 2003. https://publications.rwth-aachen.de/record/58045