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VDI-Verl
Relaxationsphänomene in keramischen Dünnschichten für zukünftige hochintegrierte Halbleiterspeicher
Degree
thesis:*- Grantor dc:publisher
- VDI-Verl
- Year dc:date
- 1998
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Schumacher, Marcus
Rights
dc:rights- Statement dc:rights
-
- info:eu-repo/semantics/closedAccess
- Language dc:language
- ger
Identifiers
dc:identifier.*- OAI identifier oai:identifier
- oai:publications.rwth-aachen.de:58013